{"id":16,"date":"2026-09-15T12:37:59","date_gmt":"2026-09-15T10:37:59","guid":{"rendered":"https:\/\/wp.icmm.csic.es\/emmh\/?page_id=16"},"modified":"2026-09-16T11:06:35","modified_gmt":"2026-09-16T09:06:35","slug":"16-2","status":"publish","type":"page","link":"https:\/\/wp.icmm.csic.es\/emmh\/16-2\/","title":{"rendered":"Sputtering Lab"},"content":{"rendered":"
Sputtering Lab<\/div>\n

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Welcome to the sputtering lab website of our group. Here a\u00a0complete and versatile set of equipment for fabrication of thin films and nanostructured materials by physical vapor deposition techniques is available to develop a large variety of research topics on nanoscience and materials science.<\/div>\n
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Labs: 001, 039 and 123<\/div>\n
Contact: cprieto at icmm.csic.es<\/div>\n
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People<\/strong><\/p>\n

Prof. Carlos Prieto (head)<\/p>\n

Dr. F\u00e9lix Jim\u00e9nez-Villacorta<\/p>\n

Leo \u00c1lvarez- Fraga<\/p>\n

Adri\u00e1n Rodr\u00edguez Palomo<\/p>\n

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External users \/ Collaborators<\/strong><\/p>\n

Prof. Rafael Ram\u00edrez (U. Carlos III)<\/p>\n

Dr. Jorge S\u00e1nchez-Marcos\u00a0<\/a>(U. Aut\u00f3noma Madrid)<\/p>\n

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Preparation techniques<\/strong><\/p>\n

–\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 DC- and RF- magnetron sputtering.<\/p>\n

–\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Co-sputtering and sequential sputtering deposition.<\/p>\n

–\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Gas phase aggregation technique for nanoparticle deposition.<\/p>\n

–\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Low and high substrate temperature deposition.<\/p>\n

–\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Electron beam physical physical deposition.<\/p>\n

–\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0 Low-pressure chemical vapor deposition.<\/p>\n

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Research topics<\/strong><\/p>\n\n\n\n
\"\"<\/td>\n– \u00a0 \u00a0 Graphene-based and oxide transparent conductive materials (TCM).<\/p>\n

– \u00a0 \u00a0 Selective coatings for thermo-solar receivers.<\/p>\n

– \u00a0 \u00a0 Nanostructured magnetic materials.<\/p>\n

– \u00a0 \u00a0 Thermoelectric thin films.<\/p>\n

– \u00a0 \u00a0 Complex oxide thin films with multifunctional properties.<\/p>\n

For a list of recent papers, please click\u00a0here<\/a>.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

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Projects<\/strong><\/p>\n

–\u00a0 \u00a0 \u00abGeneraci\u00f3n de electricidad mediante materiales termoel\u00e9ctricos y recubrimientos selectivos solares, \u00bfpueden ser eficientes estos dispositivos?\u00bb. (EXPLORA,\u00a0MAT2014-61582-EXP). I. Ciencia de Materiales de Madrid, (2015-2017). PI: C. Prieto<\/p>\n

– \u00a0 \u201cNew solar collector concept for high temperature operation in CSP applications\u201d (HITECO), SP1-Cooperation Collaborative project FP7-ENERGY-2010-1 (European Commission, Grant Agreement No. 256830). PI: C. Prieto<\/p>\n

– \u00a0 \u00a0\u201cGraphene-based hybrid materials for optoelectronic properties\u201d (MAT2012-37276) I. Ciencia de Materiales de Madrid (CSIC) (2013-2015). PI: A. de Andr\u00e9s.\u00a0 \u00a0\u00a0<\/span><\/p>\n

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Equipment<\/strong><\/p>\n\n\n\n\n\n\n
\"\"<\/td>\n– Vacuum chamber (Pfeiffer – PLS500) equipped with 3 magnetron sputtering sources and 4-boat electron-beam evaporator (6.08 kW), for sequential sputtering, co-sputtering and sputtering deposition at high substrate temperatures.<\/p>\n

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– DC- and RF- power sources for magnetron sputtering.<\/p>\n

– High-vacuum flow-controlled furnace.<\/p>\n

– Oven for target sintering and standard heat treatment.<\/td>\n<\/tr>\n

\u00a0\"\"<\/td>\n–\u00a0Cluster magnetron source for deposition of nanoparticles on substrate with controlled conditions; equipped with additional magnetron for sequential sputtering for fabrication of nanoparticle\/film systems.<\/td>\n<\/tr>\n
\u00a0\"\"<\/td>\n–\u00a0Home-made magnetron sputtering system for deposition\/coating on pieces and substrates with non-standard geometry.<\/td>\n<\/tr>\n
\"\"<\/td>\n– Low-pressure chemical vapor deposition + Magnetron sputtering chamber for fabrication of graphene-based hybrid materials.<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\u00a0<\/strong><\/p>\n

Previously, in the sputtering lab<\/strong><\/p>\n

Xavier D\u00edez-Betri\u00fa<\/p>\n

Eduardo Salas-Colera<\/p>\n

Roc\u00edo Mart\u00ednez-Morillas<\/p>\n

Ana Espinosa<\/p>\n

Eva C\u00e9spedes<\/p>\n

Jorge S\u00e1nchez-Marcos<\/p>\n

M\u00aa \u00c1ngeles Laguna-Marco<\/p>\n

Isabel Mu\u00f1oz-Ochando<\/p>\n

Mercedes Vila<\/p>\n

\u00c1ngel Mu\u00f1oz-Mart\u00edn<\/p>\n

Susana Taboada<\/p>\n

Antonio Bernab\u00e9<\/p>\n

Ram\u00f3n Casta\u00f1er<\/p>\n

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Phone: +34 91 349 000\u00a0(Ext. 001 y 039)<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

Sputtering Lab   Welcome to the sputtering lab website of our group. Here a\u00a0complete and versatile set of equipment for fabrication of thin films and nanostructured materials by physical vapor deposition techniques is available to develop a large variety of research topics on nanoscience and materials science. Labs: 001, 039 and 123 Contact: cprieto at […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-16","page","type-page","status-publish","hentry","post-preview"],"_links":{"self":[{"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/pages\/16","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/comments?post=16"}],"version-history":[{"count":4,"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/pages\/16\/revisions"}],"predecessor-version":[{"id":152,"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/pages\/16\/revisions\/152"}],"wp:attachment":[{"href":"https:\/\/wp.icmm.csic.es\/emmh\/wp-json\/wp\/v2\/media?parent=16"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}