We report on the processing of La0.67Ca0.3MnO3 films by DC-sputtering on Silicon. The films are fully characterised by X-ray diffraction, magnetisation and resistivity. Thermal protocols are optimised to improve the him properties. We have also studied the effect of the film thickness on the low-field magnetoresistance of these systems. Our results evidence the hardening as the thickness of the film decreases. (C) 1999 Elsevier Science B.V. All rights reserved.