{"id":183,"date":"2015-06-01T14:05:45","date_gmt":"2015-06-01T12:05:45","guid":{"rendered":"http:\/\/www.icmm.csic.es\/forcetool\/?page_id=183"},"modified":"2015-06-01T14:05:45","modified_gmt":"2015-06-01T12:05:45","slug":"scanning-probe-lithography","status":"publish","type":"page","link":"https:\/\/wp.icmm.csic.es\/forcetool\/research-activities\/nanofabrication-and-nanolithography\/scanning-probe-lithography\/","title":{"rendered":"Scanning Probe Lithography"},"content":{"rendered":"<p>Scanning probe lithography is based on the spatial confinement of chemical reactions. This nanolithography is compatible with atmospheric pressure environments which could lead to low-cost approaches for making nanometer-scale devices.<\/p>\n<div id=\"attachment_210\" style=\"width: 549px\" class=\"wp-caption aligncenter\"><a href=\"http:\/\/www.icmm.csic.es\/forcetool\/wp-content\/uploads\/2015\/06\/Scanning-Probe-Image-1.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-210\" class=\"wp-image-210 size-full\" src=\"http:\/\/www.icmm.csic.es\/forcetool\/wp-content\/uploads\/2015\/06\/Scanning-Probe-Image-1.jpg\" alt=\"Scanning Probe Image\" width=\"539\" height=\"338\" \/><\/a><p id=\"caption-attachment-210\" class=\"wp-caption-text\">a. Scheme of SPL. b. Classification of the SPL families<\/p><\/div>\n<p>The chemistry involved in scanning probe lithography and thus the type of fabricated nanopatterns can be tuned by changing the reaction media, e.g, using organic vapors (fig 2a) or ozone-enriched atmosphere (fig 2b) or changing the substrate material, e.g, silicon (fig 2c) or MoS2 thin film (fig 2d).<\/p>\n<div id=\"attachment_209\" style=\"width: 544px\" class=\"wp-caption aligncenter\"><a href=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/SP-IMAGE-1.jpg\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-209\" class=\"wp-image-209 size-full\" src=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/SP-IMAGE-1.jpg\" alt=\"SP IMAGE\" width=\"534\" height=\"462\" srcset=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/SP-IMAGE-1.jpg 534w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/SP-IMAGE-1-300x260.jpg 300w\" sizes=\"auto, (max-width: 534px) 100vw, 534px\" \/><\/a><p id=\"caption-attachment-209\" class=\"wp-caption-text\">a. Octane SPL made parallel array of wires b. Silicon oxide patterns made by O- SPL in ozone c.Silicon oxide lines made by O-SPL d.MoO3 features patterned on a thin layer of MoS2<\/p><\/div>\n<p><strong>Relevant publications: <\/strong><\/p>\n<p>\u2022R. Garcia, A. W. Knoll and E. Riedo, Nature Nanotechnology<strong>\u00a09<\/strong>, 577 (2014)<\/p>\n<p align=\"justify\">\u2022R. V. Mart\u00ednez and R. Garc\u00eda,Nano Letters\u00a0<strong>5<\/strong>, 1161 (2005)<\/p>\n<p align=\"justify\">\u2022M. Calleja and R. Garc\u00eda\u00a0Applied Physics Letters\u00a0<strong>76<\/strong>, 3427 (2000)<\/p>\n<p align=\"justify\">\u2022R. Garc\u00eda, N.S. Losilla, J. Mart\u00ednez, R.V. Mart\u00ednez, F.J. Palomares, Y. Huttel, M. Calvaresi, and F. Zerbetto<br \/>\nApplied Physics Letters\u00a0<strong>96<\/strong>, 143110 (2010)<\/p>\n<p align=\"justify\">\u2022F. M. Espinosa, Y. K. Ryu, K. Marinov, D. Dumcenco, A. Kis and R. Garc\u00eda. Applied Physics Letters\u00a0,<strong>106<\/strong>, 103503 (2015)<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Scanning probe lithography is based on the spatial confinement of chemical reactions. This nanolithography is compatible with atmospheric pressure environments which could lead to low-cost approaches for making nanometer-scale devices. The chemistry involved in&#46;&#46;&#46;<\/p>\n","protected":false},"author":58,"featured_media":0,"parent":179,"menu_order":1,"comment_status":"closed","ping_status":"open","template":"","meta":{"ngg_post_thumbnail":0,"footnotes":""},"class_list":["post-183","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages\/183","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/users\/58"}],"replies":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/comments?post=183"}],"version-history":[{"count":0,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages\/183\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages\/179"}],"wp:attachment":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/media?parent=183"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}