{"id":308,"date":"2015-06-02T10:17:21","date_gmt":"2015-06-02T08:17:21","guid":{"rendered":"http:\/\/www.icmm.csic.es\/forcetool\/?page_id=308"},"modified":"2021-01-13T17:04:33","modified_gmt":"2021-01-13T17:04:33","slug":"cleanroom","status":"publish","type":"page","link":"https:\/\/wp.icmm.csic.es\/forcetool\/experimental-techniques\/cleanroom\/","title":{"rendered":"Cleanroom"},"content":{"rendered":"<p><a href=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/cleanroom.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-351\" src=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/cleanroom.jpg\" alt=\"cleanroom\" width=\"600\" height=\"450\" srcset=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/cleanroom.jpg 600w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2015\/06\/cleanroom-300x225.jpg 300w\" sizes=\"auto, (max-width: 600px) 100vw, 600px\" \/><\/a><\/p>\n<div id=\"attachment_1479\" style=\"width: 610px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-1479\" class=\" wp-image-1479\" src=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/alineadora-300x135.jpg\" alt=\"\" width=\"600\" height=\"270\" srcset=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/alineadora-300x135.jpg 300w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/alineadora-1024x461.jpg 1024w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/alineadora-768x346.jpg 768w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/alineadora-1536x692.jpg 1536w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/alineadora-2048x922.jpg 2048w\" sizes=\"auto, (max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-1479\" class=\"wp-caption-text\">Aliner<\/p><\/div>\n<div id=\"attachment_1478\" style=\"width: 610px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-1478\" class=\" wp-image-1478\" src=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/RIE1-300x221.jpg\" alt=\"\" width=\"600\" height=\"442\" srcset=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/RIE1-300x221.jpg 300w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/RIE1-1024x753.jpg 1024w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/RIE1-768x565.jpg 768w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/RIE1-1536x1129.jpg 1536w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/RIE1-2048x1505.jpg 2048w\" sizes=\"auto, (max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-1478\" class=\"wp-caption-text\">Reactive-ion Etching (RIE)<\/p><\/div>\n<div id=\"attachment_1477\" style=\"width: 610px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-1477\" class=\" wp-image-1477\" src=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/plasma02-300x274.jpg\" alt=\"\" width=\"600\" height=\"548\" srcset=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/plasma02-300x274.jpg 300w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/plasma02-1024x934.jpg 1024w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/plasma02-768x700.jpg 768w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/plasma02-1536x1401.jpg 1536w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/plasma02.jpg 1945w\" sizes=\"auto, (max-width: 600px) 100vw, 600px\" \/><p id=\"caption-attachment-1477\" class=\"wp-caption-text\">Plasma Etching<\/p><\/div>\n<div id=\"attachment_1476\" style=\"width: 257px\" class=\"wp-caption alignnone\"><img loading=\"lazy\" decoding=\"async\" aria-describedby=\"caption-attachment-1476\" class=\" wp-image-1476\" src=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/ebeam-evaporator-135x300.jpg\" alt=\"\" width=\"247\" height=\"550\" srcset=\"https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/ebeam-evaporator-135x300.jpg 135w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/ebeam-evaporator-461x1024.jpg 461w, https:\/\/wp.icmm.csic.es\/forcetool\/wp-content\/uploads\/sites\/32\/2021\/01\/ebeam-evaporator-922x2048.jpg 922w\" sizes=\"auto, (max-width: 247px) 100vw, 247px\" \/><p id=\"caption-attachment-1476\" class=\"wp-caption-text\">Electron Beam evaporator<\/p><\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":58,"featured_media":0,"parent":16,"menu_order":5,"comment_status":"closed","ping_status":"open","template":"","meta":{"ngg_post_thumbnail":0,"footnotes":""},"class_list":["post-308","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages\/308","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/users\/58"}],"replies":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/comments?post=308"}],"version-history":[{"count":2,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages\/308\/revisions"}],"predecessor-version":[{"id":1481,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages\/308\/revisions\/1481"}],"up":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/pages\/16"}],"wp:attachment":[{"href":"https:\/\/wp.icmm.csic.es\/forcetool\/wp-json\/wp\/v2\/media?parent=308"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}