{"id":1216,"date":"2016-12-23T18:11:35","date_gmt":"2016-12-23T18:11:35","guid":{"rendered":"http:\/\/www.icmm.csic.es\/Nanocarma\/?p=1216"},"modified":"2019-03-11T07:16:55","modified_gmt":"2019-03-11T07:16:55","slug":"study-of-the-formation-mechanism-of-hierarchical-silicon-structures-produced-by-sequential-ion-beam-irradiation-and-anodic-etching","status":"publish","type":"post","link":"https:\/\/wp.icmm.csic.es\/nanocarma\/?p=1216","title":{"rendered":"Study of the formation mechanism of hierarchical silicon structures produced by sequential ion beam irradiation and anodic etching"},"content":{"rendered":"<p id=\"authname_N415870e0N62787860\" class=\"authorName svAuthor\">In a collaboration with the <a href=\"http:\/\/www.uam.es\">Autonomous University of Madrid<\/a> (Department of Applied Physics and the <a href=\"https:\/\/www.cmam.uam.es\/\">Center for Micro Analysis of Materials<\/a>) and the <a href=\"http:\/\/www.isfh.de\/\">Institut f\u00fcr Solarenergieforschung Hameln (ISFH) <\/a>of Germany we have studied the formation of micropatterns combining nanostructured (porous) Si (NPSi) and bulk Si by a sequential process of selective high energy ion irradiation and anodic etching.<\/p>\n<p>E. Punz\u00f3n Quijorna, S. Kajari-Shr\u00f6nder, F. Agull\u00f3-Rueda, M. Manso Silv\u00e1n, R. J. Mart\u00edn Palma, P. Herrero Fern\u00e1ndez, V. Torres-Costa, and A. Climent, \u201cStudy of the formation mechanism of hierarchical silicon structures produced by sequential ion beam irradiation and anodic etching,\u201d <a href=\"http:\/\/dx.doi.org\/10.1016\/j.vacuum.2016.10.011\">Vacuum <strong>138<\/strong>, 238&#8211;243 (2017)<\/a>.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>In a collaboration with the Autonomous University of Madrid (Department of Applied Physics and the Center for Micro Analysis of Materials) and the Institut f\u00fcr Solarenergieforschung Hameln (ISFH) of Germany we have studied the formation of micropatterns combining nanostructured (porous) &hellip; <a href=\"https:\/\/wp.icmm.csic.es\/nanocarma\/?p=1216\">Sigue leyendo <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"ngg_post_thumbnail":0,"footnotes":""},"categories":[7,8,9,10,11,12,17,18],"tags":[23,61,33,64,41,43,45],"class_list":["post-1216","post","type-post","status-publish","format-standard","hentry","category-hrtem","category-ion-irradiation","category-microscopy","category-nanocharacterization","category-nanoscience","category-nanotechnology","category-raman-spectroscopy","category-silicon","tag-article","tag-coating-2","tag-ion-irradiation","tag-irradiation","tag-raman-spectroscopy","tag-semiconductor","tag-silicon"],"_links":{"self":[{"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=\/wp\/v2\/posts\/1216","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1216"}],"version-history":[{"count":1,"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=\/wp\/v2\/posts\/1216\/revisions"}],"predecessor-version":[{"id":1318,"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=\/wp\/v2\/posts\/1216\/revisions\/1318"}],"wp:attachment":[{"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1216"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1216"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/wp.icmm.csic.es\/nanocarma\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1216"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}