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PVD Coatings

Topics: PVD COATINGS

 

 

 

  1.  Doped and nanostructured ZnO films
    • Synthesis and characterisation of ZnO films by DC sputtering at room temperature
    • Incorporation of Ti in ZnO ultrathin films(< 30nm)
    • ZnO deposition on nanostructured Al2O3 membranes
    • Growth of  ordered ZnO nanostructures by oblique angle deposition (OAD)
  2. Mixed oxides to control the refractive index
    • Cr-Al and Cr-Si Mixed Oxides produced by magnetron sputtering
    • Cr-Si Mixed Oxides Produced by Reactive Ion Beam Mixing
  3. Selective coatings for solar concentration applications
    • Development of novel oxides and nitride based cermets for high temperature CSP coatings
  4. AgMeN coatings for biomedical applications
    • Ag surface segretaion on Ag-TiCN coatings
    • Controlled release of Ag+ in AgZrCN coatings
  5. Doped and nanostructured ZnO films:
    • Synthesis and characterisation of ZnO films by DC sputtering at room temperatureSystematic study of chemical, structural and optical properties
      • Characterisation by perfilometry, RBS, ERDA-TOF, GIXRD, IR, SEM, ellipsometry, XANES, TEM
      • Stoichiometry control of ZnO films with % O2 in the gas flux
      • Dependence in the preferential crystalline orientation with %O2 and thickness
      • “Post-annealing” treatment to correlate the presence of oxygen with structural defects in the ZnO films
      • Excellent optical (n y Eg)  and structural (wurzite) properties

 

 

 

      • Related papers:
        • M. Yuste, R. Escobar Galindo, I. Caretti, R. Torres and O.Sánchez. Influence of the oxygen partial pressure and post-deposition annealing on the structure and optical properties of ZnO films grown by DC magnetron sputtering at room temperature. J. Phys. D: Appl. Phys. 45 (2012) 025303.
        • M. Jullien, D. Horwat, F. Manzeh, R. Escobar Galindo, Ph. Bauer, J.F. Pierson, J.L. Endrino. Influence of the nanoscale structural features on the properties and electronic structure of Al-doped ZnO thin films: an X-ray absorption study. Solar Energy Materials & Solar Cells 95 (2011) 2341–2346
    • Incorporation of Ti in ZnO ultrathin films(< 30nm)
      • Ti content (0-30 at.%) controled by tuning power on Ti, Zn cathodes
      • Characterisation by RBS,  XANES, XPS, TEM, 4-probe
      • Structural and coordination changes from wurtzite (w-Zn(Ti)O) to ilmenite (h-ZnTiO3) structure
      • Lowest resistivity of 10-2 Ω cm for TZO with 0.5 at% Ti
      • Related papers:
        • I. Caretti, M. Yuste, R. Torres, O.Sánchez, I. Jimenez and R. Escobar Galindo.  Coordination chemistry of titanium and zinc in Ti(1-x)Zn2xO2 (0 <= x <= 1) ultrathin films grown by DC reactive magnetron sputtering RSC Adv., 2012, 2 (7), 2696 – 2699
    • ZnO deposition on nanostructured Al2O3 membranes
      • Control on the pore diameter (10-100 nm)
      • Negative replica of the membrane by ZnO sputtering deposition
      • Ultrathin ZnO (30 nm) on 15 nm pore membrane
      • Growth of  ordered ZnO nanostructures by oblique angle deposition (OAD)
      • Control on the stoichiometry and crystal orientation of OAD ZnO films by tuning pO2 and distance target-substrate
      • ZnO refractive index modulation with angle of deposition due to density changes
      • Related papers:
        • D. Toledano, R. Escobar Galindo, M. Yuste, J. M. Albella and O. Sánchez. Compositional and structural properties of nanostructured ZnO thin films grown by oblique angle reactive sputtering deposition: Effect on the refractive index. J. Phys. D: Appl. Phys. 46 (2012) 045306.

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