We also pursue the parallelization of the scanning probe lithography by up scaling the physical processes, such as local oxidation. The process requires the use of a solid support (stamp) with multiple protrusions as the cathode electrode.
![afm topography](https://wp.icmm.csic.es/forcetool/wp-content/uploads/sites/32/2015/06/afm-topography.jpg)
Fig.1 AFM topography images of SiO2 pattern on silicon surface made by Local Oxidation Nanolithography