We also pursue the parallelization of the scanning probe lithography by up scaling the physical processes, such as local oxidation. The process requires the use of a solid support (stamp) with multiple protrusions as the cathode electrode.

Fig.1 AFM topography images of SiO2 pattern on silicon surface made by Local Oxidation Nanolithography

Fig.2. AFM topography images of pattern fabricated on silicon surface using Local Oxidation Nanolithography in octane atmosphere