E. Punzón Quijorna, V. Torres Costa, F. Agulló-Rueda, P. Herrero Fernández, A. Climent, F. Rossi and M. Manso Silván, «TiNxOy/TiN dielectric contrasts obtained by ion implantation of O2+; structural, optical and electrical properties,» J. Phys. D: Appl. Phys. 44(23), 235501 (2011).
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